Lithography

Brewer Science lithography products have been shaping the semiconductor industry since 1981. Over the years, new product lines, capabilities, and specifications have been improved to deliver the best


The biggest problem facing lithographers using EUV is the RLS trade-off: simultaneous improvement of resolution, line width roughness, and photosensitivity.

OptiStack® multilayer systems are our flagship lithography technology, and are used for leading-edge high volume IC manufacturing.

ARC® antireflective coatings are the industry benchmark for reflection control and light absorption during photolithography.