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Directed Self-Assembly: From the Top-Down to the Bottom-Up

In previous posts, we’ve made references to Moore’s law and how, with uncanny accuracy, it has predicted that the number of transistors in a dense integrated circuit (IC) would double approximately every two years. The semiconductor industry has tirelessly chased Moore's law ever since it was first coined in the 1970s, but as ICs have…

  DSA, Integrated Circuits, Directed Self-Assembly, Lithography Click Here to Read More

Brewer Science Showcases Original Technology Products at 2017 SPIE Advanced Lithography

February 10, 2017 – San Jose, CA – Brewer Science invites you to join us February 26 through March 2 at SPIE Advanced Lithography in San Jose, CA, as we showcase original technology products created and manufactured at Brewer Science. Attendees will have the opportunity to learn more about the Brewer Science suite of lithography…

  Technology, Lithography, 2017 Click Here to Read More

Advanced Lithography: What is Multilayer Technology?

Multilayer technology from Brewer Science has allowed the industry to continue to push the limits of advanced lithography well into the future. Our experts explain why it was needed and how it eventually became the industry standard for leading-edge semiconductor manufacturing.

  2016, Technology, Multilayer, Lithography Click Here to Read More

Lithography process simplification for reduced cost of ownership

Cost of ownership plays an important role in lithography process materials and methods decisions. Process simplifications brought about by layer-to-layer synergy drive significant cost of ownership advantages for multilayer lithography systems such as the Brewer Science® OptiStack® system. Savings in mask engineering and manufacture are the greatest cost difference. Optical proximity correction (OPC) algorithms need…

  EUV, Multilayer, Lithography Click Here to Read More

Planarization: Leveling extreme topography for microelectronics

Fabrication of microelectronic devices increasingly involves the creation of high-aspect-ratio structures (those with large height or depth and narrow width, such as trenches, vias, columns, and mesas).  These structures provide isolation; serve as conduits for electrical, optical, or fluid signals; or enable pre-dicing before die singulation. New designs in semiconductor and MEMS devices are pushing…

  Lithography, planarization, MEMS Click Here to Read More

Thermally curable middle layer for 193-nm trilayer resist process

New lithographic compositions, for use as middle layers in trilayer processes  resist processes can be applied as very thin films with a very thin layer of photoresist being applied to the top of the middle layer. Thus, the underlying bottom anti-reflective coating is still protected even though the overall stack (i.e., anti-reflective coating plus middle…

  trilayer resist process, lithographic, lithographic composition, anti-reflective coating, 193-nm, unilayer processing, depth-of-focus, Lithography, trilayer Click Here to Read More

Background of multilayer processing

As semiconductor devices evolve, smaller and smaller feature sizes are required to achieve the performance desired by the consumer. Smaller features give rise to lower power consumption for mobile devices, less expensive devices due to the ability to manufacture more chips per wafer, and faster overall speed.  Why multilayer? Smaller feature sizes also lead to…

  Multilayer, Lithography Click Here to Read More

How a simple liquid changed the world

It may not look like much, but those little bottles contain one of the most important technological advances of the last 30 years. The 1970s brought an impressive wave of innovation in the United States. In particular, personal computers and electronics began to take root as a mainstay in the home and office. By the…

  Lithography, moore's law, arc materials, anti-reflective coatings Click Here to Read More
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